Confirmed exhibitors

AMO GmbH’s strategy is to close the gap between basic research and industrial application. Under the management of Prof. Dr. Lemme, the company has a state-of-the-art 400 m² clean room at its disposal for this purpose. The focus is on the identification of new potentials in the field of nanotechnology for various applications in information technology, biotechnology, photonics and sensor technology. The special strengths lie in lithography, structure transfer and a highly qualified research team with many years of experience in process technology and application. In addition to providing the R&D infrastructure, AMO offers consulting services, prototype development and the production of nanostructures.
Coatema Coating Machinery GmbH offers a full range of coating, printing and laminating equipment and R&D services.
Coatema is part of the ATH Group in Hamburg and is operating since over 40 years in markets like textiles, renewables, membranes, medical, pharmaceutical, prepreg, fuel cells and printed electronics. The company vision is Lab2Fab and over the years Coatema very much specialized in high tech niche markets.
One of these markets is Nanoimprint Lithography (NIL) technologies, Coatema is active here with it´s brand TEMICOAT which is jointly owned and operated by Coatema and Temicon.
A focus on high tech markets, world class service support and one of the most versatile R&D centre in the world for coating, printing and laminating enables Coatema to offer complete laboratory to fabrication (Lab-to-Fab) technologies.

Good Reasons for EASYTEC High Power UV LED Systems
EASYTEC’s UV LED systems are the highest performing UV LED radiators worldwide. They emit a hitherto unachieved top-class optical radiation and they do so with all available wavelengths from 365 nm up to 410 nm wavelength (peak).

EV Group (EVG) is a leading supplier of equipment and process solutions for the manufacture of semiconductors, microelectromechanical systems (MEMS), compound semiconductors, power devices, and nanotechnology devices. Key products include wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems. Founded in 1980, EV Group services and supports an elaborate network of global customers and partners all over the world.
GermanLitho GmbH is a leading supplier of equipment and process solutions for micro- and nanostructuring applications. We specialize in nanopatterning and NanoImprint Lithography (NIL) technologies.
GermanLitho‘s core competence is to offer total solutions of nanoimprint to our customers. Our portfolio covers from equipments, masters/stamps, consumable materials, consultance to production service based on nanoimprint. We are expanding the use of nanoimprint technologies for innovative products within various applications such as LED-, MEMs/NEMs-, AR/VR-, 3D Sensing-, Bio Chips-, Displays and solar cells industries, etc.
GermanLitho is commited to being the innovation leader to solve the world‘s toughest nanostructuring challenges. This vision helps to solve high-value problems and enables our customers to successfully commercialize their production ideas.
Himax IGI designs & manufactures innovative micro & nano patterns for displays, optics, telecommunications, biomedical, & other applications. NanoSculpt technologies are used to make photoresist masters, nickel shims, & soft molds with diverse pattern characteristics that create the desired surface or optical properties. Products made by Himax IGI are used in Nano-imprint lithography, injection molding, roll-to-roll, embossing, stamping, & other prototype and high volume manufacturing processes.
The Institut für Mikroelektronik Stuttgart (IMS CHIPS) concentrates on industrial-oriented research in semiconductor integration, integrated circuits & systems, M(E)MS technology, nano structuring and image sensor technology.
The institute is partner to various small and medium-scale companies in Baden Württemberg in particular and cooperates with international semiconductor corporations and contractors.
It is top ranking in nano structuring process development while also concentrating on CMOS circuits, GaN for power electronics, specialized silicon processing, image sensors and photonics.
JOANNEUM RESEARCH Forschungsgesellschaft mbH is a business oriented leader of innovation and technology providers. With focusing on applied research and technology development, the INNOVATION COMPANY plays a key role in transferring technology and know-how in Styria.
Our MATERIALS institute focuses primarily on micro- und nanotechnology, surface functionalization, materials science, sensors und laser-production technologies. The Institute’s Research Group for Hybrid Electronics and Patterning has more than 10 years of experience in the development of manufacturing processes for optical, optoelectronic and electronic components. Its expertise in design, fabrication, characterization and optimisation, combined with the new pilot plant provide a sound basis for the development of industrial processes.
micro resist technology GmbH is a leading company for the development and production of innovative photoresists, special polymers as well as ancillaries for micro- and nanolithography and micro-optical applications. Our products are applied in key technologies like microsystems technologies, microelectronics, micro and nano photonics micro and nano engineering as well as in Life Sciences.
Our worldwide customers are innovative manufacturing companies whose value creation is significantly based on micro and nano fabrication. Furthermore, leading research institutes and top level universities are our clients which we support already in the early phase of their technology development. All our customers appreciate our expertise for photoresists, polymers, photo polymers as well as our comprehensive technological consultations with a holistically view on the lithographic interaction between material and processes. It is our aim to have satisfied and enthusiastic customers who are successful with their individual processes. As a reliable and experienced partner we also offer product-supporting lithographic services.
Morphotonics is the leading supplier of Roll-to-Plate Nanoimprint equipment, stamps and materials. Through its unique nanoimprint technology, micro- and nanostructures can be applied on very large areas (up to and beyond 2 m²) in high volume at an unparalleled low cost. This opens up the potential of nanoimprinting for innovative features and functions in, for example, displays, smartphones, lighting products or solar panels. The reusable flexible stamp ensures a cost-effective and versatile process that can be applied on various types of substrates (rigid/flexible/opaque). Within its competence centre, Morphotonics offers to scale-up your master, optimize processes and facilitate low-volume production. Morphotonics supports you in bringing your nanoimprint application from lab to fab!
PROFACTOR conducts applied production research focusing on two topics: INDUSTRIAL ASSISTIVE SYSTEMS and ADDITIVE MICRO/NANO-MANUFACTURING.
PROFACTOR has years of experience in process development and in understanding materials and their properties in Nanoimprint Lithography and Inkjet Printing processes.
Both – Nanoimprinting and Inkjet Printing – are performed on large areas as well as on freeform surfaces.
RAITH is a world leading manufacturer of nanofabrication instrumentation with over 35 years of experience and an international service and support structure. RAITH supplies the best solutions for nanofabrication, electron beam lithography, focused ion beam nanofabrication, and nanoengineering. Be at the top of the game with the best future-proof RAITH solution for advanced template fabrication for NIL.
SCIL Nanoimprint Solutions offers solutions for patterning nano-structures on large wafers by using its unique and proprietary lithography technology (SCIL).
SCIL or Substrate Conformal Imprint Lithography is a cost effective, robust, high yield process enabling nanometer resolution patterns on a large variety of materials. SCIL delivers proven, high quality imprints on wafer areas up to 200 mm. It can be used to make patterns with feature sizes down to less than 10 nm and overlay alignment down to 1 µm.
SCIL Nanoimprint Solutions helps customers with optimised equipment, consumable materials and processes for high volume production. Our solutions enable manufacturers of optics and photonic products to increase performance, lower end-product costs and increase functionality.
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany.
SwissLitho AG and Heidelberg Instruments joined forces in early 2018. Together, they offer the widest range of direct write micro- and nanolithography systems in the world, from low-cost desktop solutions to high-end writers for substrates larger than 1m. Their products are used for prototyping in R&D, industrial manufacturing, and academic research. A full wafer can be patterned in a few minutes with sub-um resolution, making mask aligners obsolete. Single-nm resolution with simultaneous pattern inspection is achieved with the unique NanoFrazor technology. Systems from both companies can be used to obtain micro- and nanostructures with high aspect ratio as well as in grayscale mode, which makes them particularly suitable to create templates for NIL applications.
temicon is leading manufacturer of micro- and nano structured components and functional surfaces.
Typical applications are in the field of automotive, lighting and life science. For these industries temicon provides microstructured injection molding inserts e.g. for MLA, titer plates or optical components for automotive lighting. Furthermore temicon offers injection molding service to our customers.